對(duì)稱(chēng)驅(qū)動(dòng)式層疊壓電泵的設(shè)計(jì)

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中圖分類(lèi)號(hào)：TP391.9 文獻(xiàn)標(biāo)志碼：B 文章編號(hào)：1671-5276（2025）03-0048-04

Design of Symmetrical Drive Laminated Piezoelectric Pump

HAO Yunfeng，SHI Shuzheng，WU Huiqiang，ZHANG Landi （School of Mechanical Engineering，Hebei University of Architecture，Zhangjiakou O75Ooo，China）

Abstract：Piezoelectricpumpisanewmicrofluidicconveyinginstrumentwhichrealizesdirectionalflowofliquidbyusing inverse piezoelectricefectof piezoelectric materials.Toadesstheproblemsoflimitedoutputcapacityduetoverysmalldeforationof piezoelectricmaterialandthelowconventionalpiezoelectricpumpoperatingfrequencyleading tofailureintakeingfulladvantage ofthehigh powerdensityofpiezoelectricmaterialsathighfrequency，anovellaminateddouble-cavityparalelpiezoelectric pump is developed byusing flexure hinge displacement amplifying mechanism toamplifytheoutput displacementof piezoelectric ceramics whichdrivestwopiezoelectricpositive pumpssymmetrically.Through finite elementanalysis，theflexiblehinge amplifying mechanismandthesimple modelof thepiezoelectricpumparesimulated.Theresultsshowthatthe magnificationof theflexible hingedisplacementamplifying mechanismcanreach4.2，andthe working frequencyofthepiezoelectric pumpcanbe ashighas4218Hzunderthesymmetricdrivingcondition，whichgreatlyimprovesthetheoreticalworking frequencyof the piezoelectric pump.

Keywords：flexure hinge；piezoelectric stack；in parallel；piezoelectric pump

0 引言

壓電泵是一種利用壓電材料產(chǎn)生變形驅(qū)動(dòng)流體定向傳輸?shù)奈⑿捅肹1-2]。（剩余4934字）