前鏡參考型非定域干涉測角系統(tǒng)研究

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中圖分類號：TN249-34；TH712 文獻標識碼：A 文章編號：1004-373X（2025）16-0075-06

Research on frontmirror reference non-local interference angularmeasurement system

FANGZhenyuan，ZHANGBaowu，ZHULing，XUZijie，SUNYi，LUO Xianhuan （SchoolofMeasurementand Instrumentation，ChinaJiliangUniversity，Hangzhou31Oo18，China）

Abstract：Thenon-localinterferenceangular measuringsystemuses thelateraldisplacementof thecenterof theconcentric interferenceringgeneratedbyittodescribethechangeof themeasuredangle.Inalusiontotherelationshipbetweenthecenter lateraldisplacementdirectionandthedeflectiondirectionoftemeasuredangle，theefectivemeasurementrangeofthesystem， theresolutionof theinstrumentandotherisses，thevirtualsimulationandphysicalexperimentarecombined toconductindepthexplorationbytakingthestructuralsystemofthefront mirorreferencetypeastheobject.The theoreticalrelationship betweenthecenterlateraldisplacementoftheinterferenceconcentricringandthedeflectionofthemeasuredangleinthefront mirorreference-typeanglemeasurementsystemisestablished.The Zemaxvirtual simulationmodel isconstructed for the simulationverification.Thephysicalinstrumentwasbuiltfortesting.Theexperimentalresultsshowthatthelateraldirectionof theinterferencecenterofthefrontmirorreferencenon-localinterferenceanglemeasurementsystemisthesameasthemeasured angledeflectiondirection.Undertheconditionof givenparameters，themaximumefectiverangeof thesystemis90Omm，and theresolutioncan graduallydecreasewith the increase of the measurement range.The maximumresolutionatthe minimumrange is 0.0246′′ .The front miror reference non-local interferenceangle measurement system has the advantages of high measurement accuracy，wideapplicationscenarios，flexibleadjustmentofresolutionandmeasurementrangeaccording tomeasurementtasks， and can be competent for measurement of small angle and straightness.

Keywords：non-local interference;Tolanskyinterference;mirco-anglemeasurement；laserinterferencetechnique; interference angle measurement system;optical simulation

0 引言

微小角度測量是角度測量中的一個重要分支，在軍事、航空航天以及精密加工等領(lǐng)域有著廣泛應(yīng)用[-2]。（剩余5432字）