大面積高功率940nm光子晶體面發(fā)射激光器

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關(guān)鍵詞：光子晶體面發(fā)射半導(dǎo)體激光器；高功率；非對(duì)稱錐形中圖分類號(hào)：TN248.4 文獻(xiàn)標(biāo)識(shí)碼：ADOI：10.37188/CJL.20240264 CSTR：32170.14.CJL.20240264

Large-area High Power Photonic CrystalLaser

TANG Yingxiang'，WANG Chao*，XIAO Yao2， ZHANG Zhicheng^，LUO Chen2， ZHONG Chongxi’， ZHANG Yan2，ZHAO Wu4，LI Shunfeng4，WANG Wenxin3，WANG Jun （1.Collegeof Electronic Information，Huaiyin Institute of Technology，Huaian 223oo3，China; 2.CollegelofElectronicInformation，Sichuan University，Chengdu 61oo41，China; 3.FrontierInterdisciplinaryColege，National UniversityofDefenseTechnology，Changsha41Ooo3，China; 4.SuzhouEverBrightPhotonicsCoLtd，Suzhou215163，China） *CorrespondingAuthors，E-mail：chaowang@hyit.edu.cn；wjdz@scu.edu.cn

Abstract：Photonic crystal surface emiting laser（PCSEL）canachievelarge-area coherent oscilation by utilizing band-edge resonance effects，making it a new type of semiconductor laser capableof high-brightnesssingle-mode emission，including highlycollimated beams，power scaling with area，andlow divergence angles，which gives PCSEL great application prospects inthe fields such as lidar and 3D sensing.This paper designsa square single-crystal laticeasymmetricconicalairholestructureforthePCSEL.Byincreasing thedutycycleofthephotoniccrystal，the thresholddiferencebetweenthefundamentalmodeandhigher-order modes isenhanced，enabling high-powersinglemode laseroutput overalarge mode area.Experimental results show that the developed 940 nm PCSEL achieves an output power of 5.1 Wunder 1 0 μ s wide pulse pumping，with a slope efficiency of O.43 W/A，and its far-field light spot exhibits a single-lobe distribution with a far-field divergence angle，with a linearly polarized characteristic and an 80 % polarization．Furthermore，under 5 ns narrow pulse conditions，the output power reaches as high as 35W.The development of this device can provide a good light source for laser radar systems.

KeyWords：photonic crystalsurface emitting semiconductorlaser（PCSEL）；high power；asymmetric cone shape

1引言

光子晶體面發(fā)射激光器（PCSEL）作為一種新型的半導(dǎo)體激光器，與現(xiàn)有的邊發(fā)射激光器和垂直腔面發(fā)射激光器相比，表現(xiàn)出優(yōu)越的性能。（剩余11891字）