面向柔性鉗位型尺致動器提速驅動的協同切換控制

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Collaborative switching control for improved-speed driving of flexible clamp-type inchworm actuator

MENG Lingchen 1，2 ，YAN Peng 1，2* ， LIU Pengbo2， ZHANG Zhiming4

School ofMechanical Engineering， Shandong University， Jinan 25Oo61， China; 2. Key Laboratory ofHigh-efficiency and Clean Mechanical Manufacture of the Ministry of Education，Jinan 250061，China; 3.School ofMechanical Engineering，Qilu University of Technology （Shandong Academy ofSciences， Jinan 250353，China; 4. School ofMechanical and Electrical Engineering，Jining University，Qufu 273155，China） * Corresponding author， E -mail： yanpeng@sdu. edu. cn

Abstract： This study explores the clamping-driving coordination mechanism and control strategies for a flexible clamp-type inchworm actuator，introducing an innovative high-speed clamping switching method based on real-time clamping state information.By utilizing the parasitic motion characteristics of the flexible clamping mechanism，the proposed strategy minimizes clamping alternation time，thereby achieving higher driving speeds under identical design parameters. A static model of the parasitic motion of the clamping mechanism was first established based on the actuator's configuration and verified through simulations.The real-time clamping switching mechanism was subsequently analyzed，leading to the development of a driving strategy incorporating real-time clamping state feedback. An experimental setup was constructed to validate the theoretical model and simulation results. Experimental findings demonstrate that the proposed strategy reduces single-step switching time by 28% and increases continuous multi-step driving speed by 25% under the same design and driving voltage conditions. These results confirm the accuracy of the theoretical and simulation analyses within an acceptable margin of error. The proposed strategy significantly reduces the single-cycle operating time of the inchworm actuator，enabling continuous and stable actuation while substantially enhancing driving performance.

Key words ： flexible mechanism； inchworm actuator； parasitic movement; collaborative switching control

1引言

壓電致動器憑借定位精度高、響應速度快、體積緊湊以及與非磁性和真空環(huán)境兼容等顯著優(yōu)勢，在集成電路制造、精密光學儀器和生物醫(yī)學等領域應用廣泛[1-3]。（剩余12894字）