納米天線陣列超表面的 <img src="/qkimages/77d5/77d5202502/77d520250211-2-l.jpg" with="81px" style="vertical-align: middle;"> SEL，通過(guò)對(duì)納米天線結(jié)構(gòu)參數(shù)的調(diào)控，實(shí)現(xiàn)了超過(guò) 2 π 的相位覆蓋，并采用1階和2階渦旋相位板，成功產(chǎn)生了不同階數(shù)的渦旋光束。這一成果為光學(xué)超表面調(diào)控VCSEL光場(chǎng)技術(shù)提供了新思路。-龍?jiān)雌诳W(wǎng)" />

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基于集成氮化硅超表面VCSEL的渦旋光輸出

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關(guān)鍵詞：超表面；渦旋光束；垂直腔面發(fā)射激光器；集成光子器件中圖分類號(hào)：0436；TN248.4 文獻(xiàn)標(biāo)識(shí)碼：ADOI：10.37188/CJL.20240300 CSTR：32170.14.CJL.20240300

VortexLight OutputBasedonIntegrated Silicon Nitride MetasurfaceVCSEL

NIU Hao1，2.3，WANG Yongli3，JIANG Zengxuan3，LI Chuanchuan3， WEI Zhipeng1*， SONG Guofeng3

（1.StateKeyLaboratoryofHigh PowerSemiconductor Laser，Changchun UniversityofScienceandTechnology，

Changchun130022，China;

2.Zhongshan InstituteofChangchun UniversityofScienceandTechnology，Zhongshan528437，China;

3.LaboratoryfnoOtoelectronics，stituteofemiconuctors，insecademyofiences，BeijingOoina）

*CorrespondingAuthors，E-mail：zpweicust@126.com;sgf@semi.ac.cn

Abstract：Thelatest developmentof integrated photonicdevice technology fuly meets the marketdemand forcompactandeficientoptoelectronicsystems，andalso effectively promotes thedevelopmentofoptical metasurface technology.Among them，the integration of vertical cavity surface emiting laser（VCSEL）and metasurface can generate vectorbeamswith specific wavefronts，which greatly enhancesthe functionalityand flexibilityofoptoelectronic systems.In this paper，an 85O nm VCSEL based on nanoantenna array metasurface is designed. By adjusting the structural parameters of the nanoantenna，more than 2 π phase coverage is achieved，and vortex beams of different ordersaresuccessfully generated by using first-order and second-order vortex phase plates.This result provides a new idea for the optical metasurface control of VCSEL light field technology.

KeyWords：metasurface;vortex beam；vertical cavity surface emitting laser;integrated photonic devices

1引言

隨著對(duì)光學(xué)集成度需求的提升，傳統(tǒng)光學(xué)元件已無(wú)法滿足現(xiàn)代應(yīng)用的性能要求。（剩余11382字）

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