光譜共焦傳感器光軸與被測平板間垂直度誤差校準方法

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中圖分類號：TB9;TQ420.5 文獻標志碼：A 文章編號：1674-5124（2025）06-0081-08

Calibration method for verticality error between the optical axis of a spectral confocal sensor and the measured flat plate

PENG Qiuran， WU Yunquan， ZHOU Peng， LU Wenlong （School of Mechanical Science and Engineering， Huazhong University of Science and Technology，Wuhan 430074， China）

Abstract： In the thickness measurement of non - transparent flat plates based on bidirectional reflection of spectral confocal sensors，the verticality error betweenthe optical axis of the confocal sensor and the measured flat plate has a significant impact on the accuracy of the measurement results. In the existing calibration methods for the verticality error between the optical axis of the confocal sensor and the measured flat plate，due to the coupling relationship between relative tilt angle and distance，it is necessary to slowly and slightly adjust the mechanism to gradually approach the required wavelength，and then compare the light intensity.This results in low experimental eficiency and significant difficulty and complexity in operation. Therefore， a new method for calibrating the verticality error between the optical axis of the spectral confocal sensor and the measured flat plate is proposed， which can avoid this problem and quickly find the optimal verticality position. The measurement results of the standard sample block indicated that the measurement error of this method for different samples is within 1μm .And the experimental efficiency is improved by 55% ，and it is of great significance for the spectral confocal bidirectional counter reflection film thickness measurement system. Keywords：spectral confocal； thickness measurement; bidirectional opposition; verticality calibration; precision measurement

0 引言

光譜共焦測量是一種高精度、高靈敏性，集便捷和輕量化于一體的位移測量技術，廣泛運用于機械制造[1-2]、生命科學[3-4]、電子制造[5-6]、化學化工[7]材料學[8]等諸多領域。（剩余9171字）